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采用水热腐蚀技术制备了硅纳米孔柱阵列(siliconnanoporouspillararray,Si-NPA),并以此为衬底通过浸渍沉积制备出一种具有规则表面结构的铜/Si-NPA纳米复合薄膜(Cu/Si-NPA).形貌和结构分析表明,Si-NPA是一个典型的硅微米/纳米结构复合体系,它具有三个分明的结构层次,即微米尺度的硅柱所组成的规则阵列、硅柱表面密集分布的纳米孔洞以及组成孔壁的硅纳米单晶颗粒.研究发现,Cu/Si-NPA在形貌上保持了Si-NPA的柱状阵列特征,薄膜中铜纳米颗粒的致密度随样品表面微区几何特征在柱顶区域和柱间低谷区域的不同而交替变化,并形成一种准周期性结构.上述实验现象被认为来源于铜原子的沉积速度对Si-NPA表面微区几何特征的选择性.Si-NPA可以成为合成具有某些特殊图案、结构和功能的金属/硅纳米复合体系的理想模板.
A silicon nanoporous pillar array (Si-NPA) was prepared by hydrothermal etching and a Cu / Si-NPA nanocomposite film with regular surface structure was prepared by impregnation deposition -NPA) .Analysis of morphology and structure showed that Si-NPA is a typical siliconmicrostructure / nanostructure composite system with three distinct hierarchical structures, namely a regular array of micrometer-sized silicon columns, Densely distributed nanoholes and silicon nano-single crystal particles which constitute the pore wall.It was found that the morphology of Si / NPA columnar array was preserved by Cu / Si-NPA. The density of copper nanoparticles in the film was The geometric characteristics of the zones alternate between the top of the column and the trough of the column and form a quasi- periodic structure.The above experimental phenomena are believed to be due to the choice of the geometrical characteristics of the Si-NPA surface by the deposition rate of copper atoms Si-NPA can be the ideal template for the synthesis of metal / silicon nanocomposite systems with some special patterns, structures and functions.