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采用真空电弧离子镀技术在TC11钛合金基片上制备Ti0.75Al0.25N防护涂层,并用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、俄歇能谱分析仪(AES)、X射线光电子能谱(XPS)等方法研究了涂层在空气中650～800℃范围内的热防护性能。结果表明,在给定的温度范围内,涂层可有效降低合金的氧化增重;XPS分析表明,表层富Al氧化物以α-Al2O3的形式存在;AES深度分析表明,元素的扩散出现台阶状分布,外层富Al、O,内层富Ti、N,高温氧化时,Al的选择性氧化形成致密的Al2O3层可以阻止基体与外界氧介质的通道,这是涂层防护钛合金具有良好高温性能的原因。
The Ti0.75Al0.25N protective coating was prepared on TC11 titanium alloy substrate by vacuum arc ion plating technique and characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), Auger spectroscopy (AES), X-ray Photoelectron spectroscopy (XPS) and other methods to study the coating in the air in the range of 650 ~ 800 ℃ thermal protection performance. The results show that the coating can effectively reduce the oxidation weight gain of the alloy in a given temperature range. XPS analysis shows that the Al-rich surface layer exists in the form of α-Al2O3. The AES depth analysis shows that the diffusion of the element When the outer layer is rich in Al and O and the inner layer is rich in Ti and N, the selective oxidization of Al to form a dense Al2O3 layer can prevent the passage of the matrix from the outside oxygen medium. This is the reason why the protective titanium alloy has good high temperature The reason for the performance.