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在4Cr13不锈钢表面进行多弧离子镀沉积(Ti,Cr)N涂层,研究不同Cr含量的(Ti1-xCrx)N(x=0.28,0.56,0.73)复合薄膜在700℃的高温氧化行为。考察了薄膜氧化后的表面形貌、成分等。用热重法(TG)与差示扫描量热分析法(DSC)分析(Ti,Cr)N薄膜的加热氧化情况,并与TiN薄膜进行对比。结果表明:随着铬靶弧电流(ICr)的提高,(Ti1-xCrx)N薄膜中的Cr含量增加,Cr含量与ICr/ITi存在着线性关系;Cr含量越高,(Ti1-xCrx)N薄膜的高温抗氧化性能越好;(Ti1-xCrx)N薄膜的氧化热力学温度均高于TiN薄膜,表明Cr的加入明显提高了薄膜的氧化热力学温度。
Multi-arc ion plating (Ti, Cr) N coatings were deposited on the surface of 4Cr13 stainless steel to investigate the high-temperature oxidation behavior of (Ti1-xCrx) N (x = 0.28,0.56,0.73) composite films at 700 ℃. The surface morphology and composition of the film after oxidation were investigated. Thermal oxidation (TG) and differential scanning calorimetry (DSC) were used to analyze the thermal oxidation of (Ti, Cr) N thin films and compared with that of TiN films. The results show that the content of Cr increases with the increase of the Crr target current (ICr), and the content of Cr increases linearly with the ICr / ITi. The higher the content of Cr, the higher the content of (Ti1-xCrx) N The better the high temperature oxidation resistance of Ti1-xCrxN thin films is, the higher the oxidation temperature is, the higher the TiN thin films are, the higher the oxidation temperature is.