“微电子制造科学与技术”计划概观刘英清摘编编者的话：半导体制造技术一直是电子工业高速发展的推动力。虽然，现今所用的器件按比例缩小技术还可继续使用到０．１μｍ特征尺寸的器件，但是，随着电路集成度的提高，及其性能和可靠性的进一步改善，产品的制造成本也在不... Overview of the Microelectronics Manufacturing Science and Technology Program Liu Yingqing Abstract Editor’s Note: Semiconductor manufacturing technology has been the driving force behind the rapid growth of the electronics industry. Although today’s devices scaling down the technology can continue to use 0.1μm feature size of the device, but as the circuit integration increases, and its performance and reliability to further improve the product manufacturing costs are not ...