论文部分内容阅读
激光全息光刻是激光束应用于超微细加工的突出一例,它在周期性精细几何图形产生方面独树一帜,已成为制造大面积、高分辨率、小畸变浮雕光栅的基本手段。这种技术用途甚广,尤其对集成光学器件的发展具有特别重要的意义。
Laser holographic lithography is a prominent example of the application of laser beam in ultrafine processing. It is unique in the generation of periodic fine geometries and has become the basic method for manufacturing large-area, high-resolution and small-distortion relief gratings. This technology is very versatile and has particular significance for the development of integrated optics.