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一、引言目前,四极质谱计已广泛地用于真空系统内残余气体分析。原则上,任何一种已校准的质谱计都能用来进行真空系统内气体组分的定量分析。这种校准通常包括两个方面:图形系数和灵敏度的校准。关键的问题是要取得图形系数的好的重复性。到目前为止,有关用四极质谱计作定量分析的报道是不多的,有关图形系数重现性的报道更为少见。根据工作原理和结构,四极质谱计的质量岐视比其它质谱计,如回旋质谱计、磁偏转质谱计更为严重。因此,四极质谱计的图形系数是和其它质谱计不同的。造成图形系数变化的原因除了离子源工作条件外,主要是边缘场和分析场的质量岐视。
I. INTRODUCTION At present, quadrupole mass spectrometers have been widely used for residual gas analysis in vacuum systems. In principle, any one of the calibrated mass spectrometers can be used for quantitative analysis of gas components in a vacuum system. This calibration usually includes two aspects: the calibration of the graphics coefficient and sensitivity. The key issue is to get good repeatability of the graphics coefficients. So far, there have been few reports of quadrupole mass spectrometry for quantitative analysis, and reports of reproducibility of the pattern coefficients are much less common. According to the working principle and structure, quadrupole mass spectrometer than the other mass spectrometry, such as cyclotron mass spectrometer, magnetic deflection mass spectrometer is more serious. Therefore, the quadrupole mass spectrometer’s pattern factor is different from other mass spectrometers. In addition to the working conditions of the ion source, the reason for the change of the graphic coefficient is mainly the discrimination of the quality of the fringe field and the analysis field.