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基于功率谱密度简化公式,通过数据拟合提取出PSD曲线的两个重要评价参数。研究PSD曲线变化与超光滑表面加工工艺相关性,提出基于超光滑表面工艺过程的PSD评价技术,以指导工艺改进和新工艺的开发。
Based on the power spectrum density reduction formula, two important evaluation parameters of the PSD curve are extracted through data fitting. The correlation between PSD curve changes and ultra-smooth surface processing technology was studied. The PSD evaluation technology based on ultra-smooth surface process was proposed to guide the process improvement and the development of new technology.