1957年J.T.Wollmark首先发现并利用半导体的横向光电效应做出了世界上第一只半导体位敏光电器件。由于受当时原材料质量及加工工艺的限制,器件的整体位置线性很差,没有多少实用价值。硅平面工艺诞生之后,人们对器件结构进行了改进,并着重解决金属-半导体的欧姆接触问题,使器件的位置线性有所改善,出现了商品化的位置敏感二极管(简称PSD)。七十年代中后期,先进的加工技术促使大规模集成电路飞速发展,也给高线性PSD带来了希望。利 1957 J.T.Wollmark first discovered and made use of the lateral photoelectric effect of the semiconductor to make the world’s first semiconductor-bit-sensitive optoelectronic device. Due to the quality of the raw materials and processing technology at the time constraints, the overall location of the device linearity is poor, not much practical value. After the birth of the silicon planar technology, the device structure was improved and the ohmic contact problem of the metal-semiconductor was solved. The position linearity of the device was improved. A commercial position sensitive diode (PSD) appeared. In the mid and late 1970s, advanced processing technologies led to the rapid development of large-scale integrated circuits and brought high-linearity PSD hope. Lee