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提出了一种测量KrCl*准分子灯222 nm辐射效率的辐射度学方法。KrCl*准分子灯为同轴结构,内管和外管的内,外径分别为14,16和37,40 mm。灯中充有总气压为2×104Pa的氯气(Cl2)和氪气(Kr),其中含0.5%的氯气。KrCl*准分子灯用正弦和脉冲电源来驱动。用紫外功率计测量222 nm辐照度,辐射功率由Keitz公式计算。灯的电功率则通过高压探头和电流互感器结合示波器测量得出。结果表明,KrCl*准分子灯在脉冲电源驱动下的最佳效率(11.4%)是正弦电源的2倍。
A radiometric method for measuring the 222 nm radiation efficiency of KrCl * excimer lamps was proposed. The KrCl * excimer lamp has a coaxial structure with inner and outer diameters of 14, 16 and 37, 40 and 40 mm, respectively. The lamp was filled with chlorine (Cl2) and krypton (Kr) at a total pressure of 2 x 104 Pa containing 0.5% chlorine. The KrCl * excimer lamp is driven by a sinusoidal and pulsed power supply. The UV irradiance was used to measure the irradiance at 222 nm. The radiated power was calculated by Keitz’s formula. The electrical power of the lamp is measured by a combination of a high voltage probe and a current transformer combined with an oscilloscope. The results show that the best efficiency (11.4%) of KrCl * excimer lamps driven by pulse power is twice that of sinusoidal power sources.