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根据高精密光学系统的需求,结合目前的研究成果,基于干涉测量法研制了长曲率半径测量系统。分析了影响长曲率半径测量系统测量精度的多种误差因素,根据误差理论和系统组成建立了长曲率半径测量系统误差分配的数学模型和误差分配树。结合系统的整体使用需求,对系统测量精度的目标不确定度进行了分配和合成。结果表明,根据分配结果得到的标准不确定度为2.49μm,小于系统要求的目标不确定度2.5μm。以此分配结果作为各子系统结构设计的输入指标,总结并提出了提高曲率半径测量精度的措施,根据误差分配结果设计了符合使用需求的长曲率半径测量系统。
According to the needs of high-precision optical system, combined with the current research results, a long radius of curvature measuring system was developed based on the interferometry. A variety of error factors affecting the measurement accuracy of the long radius curvature radius measurement system are analyzed. Based on the error theory and the system composition, a mathematical model and an error distribution tree of the error distribution of the long radius curvature radius measurement system are established. Combined with the overall demand of the system, the target uncertainty of the system measurement accuracy is distributed and synthesized. The results show that the standard uncertainty obtained according to the allocation results is 2.49μm, and the target uncertainty less than the system requirement is 2.5μm. According to the results of error distribution, a long curvature radius measurement system was designed and used to meet the requirements of the system.