开发了一种测量小孔内尺寸的新方法。探测振动探针和孔内表面的电接触，并测出接触的工作循环。通过用具有恒定工作循环探针的可控扫描，获得了表面轮廓的数据。运用这一原理，成功地测量了φ２００μｍ×７００μｍ的小孔，获得了诸如直线性、倾斜和锥度这样的几何数据。 A new method to measure the size of a hole has been developed. Probe the electrical contact between the vibrating probe and the inner surface of the hole and measure the working cycle of the contact. By using controlled scanning with a constant duty cycle probe, data on the surface profile was obtained. Using this principle, small holes of φ200μm × 700μm were successfully measured, and geometric data such as linearity, tilt and taper were obtained.