随着科学技术的发展,等离子体的研究日益受到重视,等离子体物理已发展成为物理学的一个重要分支,作为高科技的各种等离子体技术,例如:等离子体物理气相沉积、等离子体表面改性、等离子体刻蚀、等离子体喷涂、等离子体电光源,等等,已广泛应用于各学科和国民经济建设的各个领域.为培养高等院校学生掌握和了解等离子的性质及等离子体参量诊断方法等基本知识,华中理工大学物理系在国家教委资助下,研制开发了系列等离子体实验仪,获得良好的效果.不仅满足本校需要,还可向其他高校和社会提供产品.该系列仪器包括— With the development of science and technology, plasma has drawn more and more attention. Plasma physics has become an important branch of physics. As a high-tech plasma technology, such as plasma physical vapor deposition, plasma surface modification Has been widely used in various disciplines and national economic construction in all fields.In order to cultivate students in higher learning to understand and understand the nature of the plasma and the plasma parameters of the diagnosis Method and other basic knowledge, Huazhong University of Science Department of Physics funded by the State Education Commission, developed a series of plasma experiment instrument, and achieved good results not only to meet the needs of our school, but also to other colleges and universities and society to provide products.The series of instruments include -