论文部分内容阅读
采用真空蒸镀法在硅片表面形成了一层具有表面增强拉曼活性的金岛膜。拉曼光谱发现该金岛膜表面存在非晶态碳的污染物。通过比较不同清洗方法的拉曼光谱可以证明,用氧气等离子体清洗金岛膜可有效去除金表面的杂质。金岛膜的表面增强拉曼活性在清洗前后没有发生明显变化。
The vacuum evaporation method is used to form a gold island film with surface-enhanced Raman activity on the surface of the silicon wafer. Raman spectra revealed the presence of amorphous carbon contaminants on the surface of the gold island membrane. By comparing the Raman spectra of different cleaning methods, it can be proved that cleaning the gold island membrane with oxygen plasma can effectively remove the gold surface impurities. The surface enhanced Raman activity of the Au island membrane did not change significantly before and after cleaning.