MICROSTRUCTURE AND PROPERTIES OF C-Cu NANOSTRUCTURE THIN FILM

来源 :金属学报：英文版 | 被引量 : 0次 | 上传用户：w33333333

【摘要】

：

Nanostructured C-Cu thin films were deposited by reactive sputtering method and co-sputtering method. The relationships between microstructures, properties, and

【作者】

：

Y.N. Sun K.X. Zhang X. Gao D.Q

【机构】

：

LanzhouInstituteofPhysics

【出处】

：

金属学报：英文版

【发表日期】

：

2002年2期

【关键词】

：

C-Cu film nanostructure optical and electrical properties C-Cu film nanostruc

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Nanostructured C-Cu thin films were deposited by reactive sputtering method and co-sputtering method. The relationships between microstructures, properties, and depo-sition parameters were studied and the results obtained from TEM, AFM, and XPS.indicate t

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MICROSTRUCTURE AND PROPERTIES OF C-Cu NANOSTRUCTURE THIN FILM

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