论文部分内容阅读
应用溶胶 -凝胶工艺在Pt/SiO2 /Si(10 0 )衬底上制备了Ba0 .6 4Sr0 .36 TiO3薄膜 ,研究了薄膜的结构与电学性能。实验结果表明 :Ba0 .6 4·Sr0 .36 TiO3薄膜经 70 0℃热处理 1h ,薄膜呈现出钙钛矿结构。当测试频率为 2 0 0Hz时 ,薄膜的介电常数和损耗因子分别为 5 92和 0 .0 2 8。在40℃时 ,Ba0 .6 4Sr0 .36 TiO3薄膜存在一扩散铁电 -顺电相变。在室温 (2 5℃ )、10 0kHz条件下测试薄膜的C -V特性得到一“蝶形”曲线 ,表明Ba0 .6 4Sr0 .36 TiO3薄膜在室温下处于铁电相 ,且当直流偏压从 -5V增至 + 5V期间 ,薄膜电容由 495 pF增至 110 8pF。热释电性能测试结果表明 :室温下Ba0 .6 4Sr0 .36 TiO3薄膜的热释电系数为 1860 μC/(m2 ·K) ,材料的优值为 3 7.4μC/(m3·K) ,这些结果表明 :应用溶胶 -凝胶工艺制备的Ba0 .6 4Sr0 .36 TiO3薄膜完全能满足红外探测器和热成像应用的需要
Ba0.64Sr0.36TiO3 thin films were prepared on Pt / SiO2 / Si (100) substrates by sol-gel process. The structure and electrical properties of the films were investigated. The experimental results show that the film has a perovskite structure when the film of Ba0.64 Sr0.36 TiO3 is heat treated at 70 ℃ for 1 h. When the test frequency is 200 Hz, the dielectric constant and dissipation factor of the films are respectively 5 92 and 0. At 40 ℃, there is a diffused ferroelectric-paraelectric phase transition in the Ba0.64Sr0.36 TiO3 thin film. The C-V characteristic of the film was tested at room temperature (25 ° C) at 100 kHz to give a “butterfly” curve, indicating that the Ba0.64Sr0.36 TiO3 film was in the ferroelectric phase at room temperature and that when DC bias from During -5V to + 5V, the film capacitance increased from 495 pF to 110 8 pF. The pyroelectric performance test results show that the pyroelectric coefficient of Ba0.64Sr0.36 TiO3 thin film is 1860 μC / (m2 · K) at room temperature, and the material has an excellent value of 3 7.4 μC / (m3 · K). These results It shows that the Ba0.64Sr0.36 TiO3 thin film prepared by sol-gel process can fully meet the needs of infrared detectors and thermal imaging applications