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介绍了一种基于横向塞曼双频激光的直线度 同轴度测量系统 ,与纵向塞曼系统相比 ,舍去了 1 4波片 ,减小了仪器尺寸 ,从原理上消除了由于 1 4波片相位延迟不是严格 90°造成的非线性误差 ;符合共路原则 ,对空气扰动有较强的抑制力 ;具有自适应性 ;信号处理采用比相技术 ,测量精度可以达到 0 .1° ;测量元件可以暂时移出光路 ,挡光后数据能够自动恢复 ;80 98单片机系统智能化稳定的频差在 10h内变化量小于 0 5kHz ;系统稳定性为 2 μm h ;示值线性相关系数优于 0 9999;适于远程准直和同轴度测量
A straightness coaxiality measurement system based on transverse Zeeman dual-frequency laser is introduced. Compared with the longitudinal Zeeman system, the 1 4 wave plate is discarded to reduce the size of the instrument, Wave plate phase delay is not strictly 90 ° caused by non-linear error; in line with common-channel principle, the air disturbance has a strong inhibitory force; with adaptive; signal processing using phase contrast technology, measurement accuracy can reach 0 .1 °; The measuring element can be temporarily moved out of the optical path and the data can be automatically recovered after the light is blocked. The variation of intelligent and stable 80 98 single-chip microcomputer system is less than 0 5 kHz within 10 h; the system stability is 2 μm h; the linear correlation coefficient of the indication is better than 0 9999; suitable for remote alignment and coaxial measurement