【摘 要】
：
基于PESC(钝化发射极太阳电池)的电池结构,制备发射极为磷离子注入、背面场为硼离子注入的全离子注入单晶硅太阳电池,分析磷和硼离子注入的退火特性和杂质分布以及离子注入硼
【机 构】
：
中国科学院半导体研究所集成光电子学国家重点实验室
【基金项目】
：
国家重大科学研究计划;国家自然科学基金
论文部分内容阅读
基于PESC(钝化发射极太阳电池)的电池结构,制备发射极为磷离子注入、背面场为硼离子注入的全离子注入单晶硅太阳电池,分析磷和硼离子注入的退火特性和杂质分布以及离子注入硼背场对电池性能的影响,并与常规POCl3扩散发射极电池进行对比.研究表明:离子注入的硼背场可明显提高电池的长波响应,使电池的开路电压提高约100 mV,效率提高5.4％;与POCl3扩散发射极电池相比,磷离子注入发射极改善了电池的短波响应,使电池效率提高0.8％;全离子注入电池的效率达到19.1％.
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