论文部分内容阅读
分别用电子束蒸发和电泳的方法在不同的衬底上制备出了LaB6薄膜,用扫描电镜(SEM)对样品表面形貌进行了分析,同时利用x射线衍射(XRD)分析了成膜参数衬底温度以及退火处理对LaB6薄膜结晶性能的影响。结果表明,所得样品为LaB6多晶薄膜,合适的衬底温度和退火处理能够提高LaB6薄膜的结晶质量。并对两种成膜方式进行了比较。
LaB6 thin films were prepared on different substrates by electron beam evaporation and electrophoresis respectively. The surface morphology of the samples was analyzed by scanning electron microscopy (SEM), and the film formation parameters were also analyzed by X-ray diffraction (XRD) Effect of Base Temperature and Annealing Treatment on Crystallization Properties of LaB6 Thin Films. The results show that the obtained sample is LaB6 polycrystalline thin film. The proper substrate temperature and annealing treatment can improve the crystallization quality of LaB6 thin films. The two film forming methods were compared.