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本文简要阐述了非蒸散型吸气剂(NEG)泵的吸气机理,着重介绍了NEG泵在超高/极高真空标准、静态膨胀法真空标准等真空计量标准中的最新应用结果。结果表明:利用NEG泵在室温下获得了10-10Pa的XHV;利用NEG泵将超高/极高真空标准校准下限延伸到了10-10Pa量级;利用NEG泵将静态膨胀法真空标准的校准下限延伸到了10-7Pa量级。最后还对用NEG泵延伸固定流导法微流量标准测量下限的可行性进行了分析。
In this paper, the mechanism of aspiration of non-evaporable getter (NEG) pump is briefly described. The latest application results of NEG pump in vacuum measurement standards of ultra-high / very high vacuum and static expansion method are emphatically introduced. The results show that the XHV of 10-10 Pa was obtained at room temperature by using NEG pump. The NEG pump was used to extend the lower limit of standard calibration of ultrahigh / ultrahigh vacuum to the order of 10-10Pa. The NEG pump was used to lower the calibration standard of static expansion method Extending to the order of 10-7 Pa. Finally, the feasibility of using NEG pump to extend the fixed flow guide method to measure the lower limit of micro-flow standard was also analyzed.