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采用磁控溅射在4Cr5MoSiV热作模具钢表面分别沉积了CrN和TiN薄膜。通过扫描电镜(SEM)和电子能谱(EDS)分析了试样的微观结构和相结构,研究了CrN和TiN薄膜的抗氧化性能,并用压痕法测定了薄膜的力学性能。结果表明,CrN薄膜的高温抗氧化性能和结合强度高于TiN薄膜,但TiN薄膜的韧性比CrN薄膜好。
The CrN and TiN films were deposited on the surface of 4Cr5MoSiV hot die steel by magnetron sputtering. The microstructure and phase structure of the samples were analyzed by scanning electron microscopy (SEM) and electron spectroscopy (EDS). The oxidation resistance of CrN and TiN films was investigated. The mechanical properties of the films were measured by indentation method. The results show that the high temperature oxidation resistance and bonding strength of CrN films are higher than that of TiN films, but the toughness of TiN films is better than that of CrN films.