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随着器件尺寸的不断缩小，沾污控制变得日趋关键，就目前的技术水平而言，只能在硅片的净化间存放、传递及加工环境等方面进行治污控制。为满足将来的需要，MMST工程研制了一种专门的微环境，用来进行硅片处理。硅片的传递在一封闭的容器中进行，人们称之为“真空载体”，它既可封闭于真空状态或大气状态，亦可封闭于惰性气体环境中。在设计上使该载体可用于作为常规设备承片台上的花兰，也可用于设备的真空锁。它的真空客量可对硅片进行真空负载锁定保持封闭，这样可使硅片在两道最大的沾污工序──—抽真空及充气过程中得以保护。
As device dimensions continue to shrink, soiling control becomes increasingly critical and, as far as current technology is concerned, pollution control can only be implemented in terms of storage, transfer, and processing of the wafer in cleanrooms. To meet future needs, MMST Engineering has developed a specialized microenvironment for silicon wafer processing. The transfer of the wafers takes place in a closed container, which people call a “vacuum carrier,” which can be enclosed either in a vacuum or in the atmosphere, or enclosed in an inert gas atmosphere. The carrier is designed to be used as a flower orchid on a conventional equipment stand and also as a vacuum lock on equipment. Its vacuum capacity allows the wafers to be vacuum-load locked and kept closed, thus protecting the wafers during the two largest contamination processes - evacuation and inflation.