用 YAG脉冲激光轰击真空室内的石墨靶 ,可以形成包含碳素的激光等离子体 ,并在硅或石英衬底上淀积形成某种类型的碳膜。用光学多道分析仪原位测量了激光等离子体的发射光谱 ,给出反应空间可能存在的反应基团有碳原子、碳离子、碳分子等 ,用拉曼光谱研究了薄膜的结构 ,证明所形成的薄膜为类金刚石膜 ,并得出碳原子和碳离子与薄膜的类金刚石结构有关。制备过程中 ,氢的参与有利于薄膜中金刚石成分的形成。空间分辨的原位激光等离子体发射光谱表明 ,在反应空间存在薄膜形成的最佳位置 Using a YAG pulsed laser to bombard a graphite target in a vacuum chamber, a laser plasma containing carbon can be formed and deposited on a silicon or quartz substrate to form some type of carbon film. The optical spectra of the laser plasma were measured in situ using an optical multi-channel analyzer. The possible reactive groups in the reaction space were carbon atoms, carbon ions and carbon molecules. The structure of the films was investigated by Raman spectroscopy. The formed film is a diamond-like carbon film, and it is concluded that carbon atoms and carbon ions are related to the diamond-like structure of the film. In the preparation process, the participation of hydrogen favors the formation of diamond components in the film. Spatially resolved in-situ laser plasma emission spectroscopy shows that there is an optimal location for film formation in the reaction space