论文部分内容阅读
分析了硅各向异性腐蚀模型及其模拟的研究现状。介绍了两类主要的腐蚀模型—几何模型和原子模型各自的特点、利弊及发展变化的趋势 ,最后又列举了几种成熟的、应用不同模型的模拟软件。
The anisotropic corrosion model of silicon and its research status are analyzed. Two kinds of main corrosion models are introduced, including their own characteristics, advantages and disadvantages, and trends of development and changes. Finally, several mature simulation softwares applying different models are listed.