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在北京同步辐射装置（ＢＳＲＦ）上用全吸收平行板充氙电离室作一级标准探测器，对硅光电二极管（ＡＸＵＶ—１００）的效率在光子能量５—６．５ｋｅＶ进行了标定，建立了二级标准探测器；ＡＸＵＶ—１００硅光电二极管在５０ｅＶ－６ｋｅＶ有很好的线性响应，将其在硬Ｘ射线波段已标定的效率曲线外推到软Ｘ射线波段，并对ＢＳＲＦ３Ｂ１Ａ和４Ｂ９Ｂ光束线在软Ｘ射线波段光子通量谱进行了初步地测量，测量结果与理论计算结果较为符合．在３Ｂ１Ａ软Ｘ光学实验站，利用二级标准探测器对用于惯性约束聚变（ＩＣＦ）的软Ｘ光探测器的灵敏度进行了标定，并取得了满意的结果．
The efficiency of the silicon photodiode (AXUV-100) was calibrated at photon energy of 5-6.5 keV using a fully absorbed parallel plate xenon ionization chamber as a first-class detector at Beijing Synchrotron Radiation Facility (BSRF) AXUV-100 silicon photodiode has a good linear response at 50eV-6keV, extrapolated its calibrated efficiency curve in the hard X-ray band to the soft X-ray band and simulated the BSRF3B1A and 4B9B beam lines The photon flux spectrum in the soft X-ray band was preliminarily measured. The measured results are in good agreement with the theoretical results. The sensitivity of the soft X-ray detector used for inertial confinement fusion (ICF) was calibrated at 3B1A soft X-ray experiment station with secondary standard detector and satisfactory results were obtained.