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本文介绍用于高精度微位移测量的差拍激光干涉仪,其不确定度优于1×10~(-3)μm,可望作为研究多种微位移测量方法的标准。
In this paper, the differential laser interferometer used for high-precision micro-displacement measurement is introduced. Its uncertainty is better than 1 × 10 ~ (-3) μm, which is expected to be the standard for the study of many kinds of micro-displacement measurement methods.