论文部分内容阅读
本文提出的一种新型宽量程差动电离规具有真空测量和检漏两种功能。它主要采用两个相同的高压强电离规(其中一个带145mL 冷阱)进行差动工作。规管采用外涂氧化钇的铱丝作阴极,其最高工作压强可达20Pa。在工作参数为V_g=165V、V_(?)=0、V_f=50V 和I_(?)=50μA 及500μA 时,真空测量范围为1.33×10~(-4)～13.3Pa。用作检漏时,采用丁烷(C_4H_10)、二氧化碳、丙酮、乙醚、四氯化碳和苯等可凝性气体作示漏气体,这些气体的置换灵敏度系数分别为11、2、4.5、6.4、2和1.3。其最小可检漏率为<10~(-5)PaL/s,响应时间约3 s。此外,仪器还具有体积小、重量轻、便于携带和使用方便等特点。适用于一般的高真空设备的真空测量和检漏
A new wide range differential ionization gauge proposed in this paper has two functions of vacuum measurement and leak detection. It uses two identical high pressure ionization gauges (one with a 145 mL cold trap) for differential operation. Regulation of the use of coated yttrium oxide yttrium cathode, the maximum working pressure up to 20Pa. Under the conditions of V_g = 165V, V_ (?) = 0, V_f = 50V and I_ (?) = 50μA and 500μA, the vacuum measurement range is 1.33 × 10 ~ (-4) ~ 13.3Pa. For leak detection, butane (C_4H_10), carbon dioxide, acetone, ethyl ether, carbon tetrachloride and benzene and other condensable gases as leak gas, the gas replacement sensitivity coefficient of 11,2,4.5, respectively, 6.4, 2 and 1.3. Its minimum leak rate is <10 ~ (-5) PaL / s and response time is about 3 s. In addition, the instrument also has a small size, light weight, easy to carry and easy to use and so on. For general high vacuum equipment vacuum measurement and leak detection