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以4H-SiC为研究对象,在800℃下,用24keV的H~+和30keV的He~+分别进行H~+单束、He~+单束、先H~+后He~+双束和先He~+后H~+双束辐照,并利用原子力显微镜(AFM)研究辐照对4H-SiC表面形貌的影响.实验表明:H~+辐照的样品表面出现直径平均约为8μm的大凸起,He~+辐照的样品表面则产生了均匀的纳米尺寸的小凸起;H~+辐照在材料表面产生的大凸起在辐照He~+后消失;而He~+预辐照之后再进行H~+辐照,材料表面不会产生大的凸起,并结合X射线衍射(XRD)数据对这种氢氦协同效应进行了解释.结论表明,He~+预辐照对凸起的形成有抑制作用,He~+后辐照则对已产生的凸起有抛光作用.
With 4H-SiC as the research object, H ~ + single beam, He ~ + single beam, H ~ + first He ~ + double beam and H ~ + The effect of irradiation on the morphology of 4H-SiC was studied by atomic force microscopy (AFM). The experimental results show that the average diameter of the samples exposed to H ~ + radiation is about 8μm Of the large protuberances, He ~ + irradiated sample surface has a uniform nano-size small protrusions; H ~ + irradiation in the material surface of the large protrusions disappear after Irradiation He ~ +; He ~ + Pre-irradiation followed by H ~ + irradiation, the material surface does not produce large protrusions, and combined with X-ray diffraction (XRD) data on the synergistic effect of hydrogen and helium were explained.Conclusions show that He ~ + pre Irradiation inhibited the formation of bulges, and He ~ + possesses the effect of polishing the bulges that have been produced.