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在超短脉冲激光系统中,像差的存在会使焦斑能量集中度降低。为了克服系统中像差的影响,提高系统最终功率密度,分析了系统中像差的来源,并利用光线追迹方法模拟了系统光路,计算了全系统的像差,提出并设计了双分离透镜作为末级空间滤波器输出透镜进行全系统像差的补偿。实验表明,利用所设计的双分离透镜,可以有效地补偿系统色差和球差,使系统输出焦斑半径从未补偿前的8.6μm缩小为5.7μm,而系统的聚焦功率密度提高了8倍,改善了装置性能。
In ultra-short pulse laser systems, the presence of aberrations reduces the focal spot energy concentration. In order to overcome the influence of aberrations in the system and increase the final power density of the system, the source of aberrations in the system is analyzed. The optical path of the system is simulated by ray tracing method, the system-wide aberration is calculated, As the final spatial filter output lens system-wide error compensation. Experiments show that the designed double separation lens can effectively compensate the system chromatic aberration and spherical aberration and reduce the output focal spot radius of the system from 8.6μm before compensation to 5.7μm without any compensation. The power density of the system is increased by 8 times, Improved device performance.