为了在牺牲层工艺中保护金属电极不被腐蚀,提出了一种利用铝层保护金属电极的方法。在试验中采用了两种铝保护层厚度300 nm和1μm,在两种腐蚀液体4NH4F∶1HF∶2甘油和1HAC∶1NH4F中进行了试验,通过试验表明,铝金属层在两种腐蚀液体中都能够有效保护金属电极,延长牺牲层的腐蚀时间。最后,通过SOI微加速度计加工工艺进一步验证了该方法的有效性。 In order to protect the metal electrode from corrosion in the sacrificial layer process, a method of protecting the metal electrode with an aluminum layer is proposed. Two aluminum protective layers, 300 nm and 1 μm in thickness, were used in the test and were tested in two corrosive liquids, 4NH4F: 1 HF: 2 glycerol and 1 HAC: NH4F. Experiments showed that the aluminum metal layer was present in both corrosive liquids The utility model can effectively protect the metal electrode and prolong the etching time of the sacrificial layer. Finally, the effectiveness of this method is further verified by SOI micro-accelerometer processing.