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介绍了一种结构简单紧凑、可用于高精度实时相位波前测量的红外点衍射干涉仪,采用类迈克耳孙的光学结构,并结合低通小孔滤波,同时使用窗口傅里叶变换的方法解调单幅离轴载波条纹。与传统波前测量技术相比,所提出的准共光路的光学系统结构有效地抑制了系统像差及外部环境干扰等对测量结果的影响,实现高精度和高分辨率的波前探测。实验结果表明,该方法能够实现高精度的相位测量,且其重复精度达到了纳米量级。
An infrared point diffraction interferometer with simple structure and compactness for high-precision real-time phase-wavefront measurement is introduced. The optical structure of the Michelson-type optical system is adopted. Combined with the low-pass aperture filtering, the window Fourier transform method Demodulate single off-axis carrier fringes. Compared with the traditional wavefront measurement technology, the proposed optical system structure of quasi-common-path effectively suppresses the influence of system aberrations and external environment interference on the measurement results and realizes wavefront detection with high precision and high resolution. Experimental results show that this method can achieve high-precision phase measurement, and its repeatability reaches nanometer order.