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传感质量的非接触式支撑是实现高精度加速度测量的重要技术途径。目前的高精度加速度计大多采用静电悬浮技术或磁悬浮技术实现对传感质量的非接触式支撑。利用激光捕获技术实现对传感质量的非接触式支撑,最大程度地减少接触式支撑方式带来的加速度测量误差。基于微结构的多光束光纤光阱系统是一种配置简单、易于小型化和集成化的光阱形式,因此,是实现小型化、高精度加速度计的现实方案。建立了基于双光束光纤光阱加速度测量系统模型。加速度测量系统分为捕获与传感、微位移检测、光学闭环3个模块。在介绍各模块功能的基础上,重点研究了双光束光纤光阱系统的力学性质。利用射线光学的方法,对双光束光纤光阱中Mie粒子的轴向力进行了理论分析和数值仿真,并通过参数优化得到了10-7g/μm的加速度测量灵敏度。结果表明:基于多光束光纤光阱的光学加速度计方案可以得到较高的测量精度。
Non-contact sensing of the quality of support is an important technical way to achieve high-precision acceleration measurement. Most current high-precision accelerometers use electrostatic levitation technology or magnetic levitation technology to achieve non-contact sensing of the quality of support. The use of laser capture technology to achieve non-contact sensing of the quality of support to minimize the impact of contact-type support acceleration measurement error. The multi-beam fiber optical trapping system based on microstructures is a kind of optical trap that is simple to configure, easy to miniaturize and integrate, and therefore is a realistic solution for realizing a miniaturized and high-precision accelerometer. A model of acceleration measurement system based on double-beam fiber optical traps was established. Acceleration measurement system is divided into capture and sensing, micro-displacement detection, optical closed-loop 3 modules. Based on the introduction of the functions of each module, the mechanical properties of the dual-beam fiber optical trapping system are mainly studied. The axial force of Mie particles in the double-beam optical fiber trap was theoretically analyzed and simulated by ray optics. The acceleration sensitivity of 10-7g / μm was obtained through the parameter optimization. The results show that the optical accelerometer scheme based on multi-beam fiber traps can obtain higher measurement accuracy.