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对自行研制的双功能扫描隧道显微镜（ＳＴＭ）的性能特点进行了研究，探讨了影响其纵、横向分辨率的有关因素；对其用于超精微观表面形貌的检测精度进行了分析，提出了其灵敏度、分辨率及视场连续可调的原理；并通过实验检测了原子级分辨率和纳米级分辨率的微观表面形貌，探讨了用ＳＴＭ在不同分辨率条件下对于微观形貌进行检测的可行性．
The performance characteristics of self-developed bifunctional scanning tunneling microscope (STM) were studied, and the relevant factors affecting its resolution in both vertical and horizontal directions were discussed. The detection precision of its application to the superfine microscopic surface topography was analyzed. The principle of sensitivity, resolution and field of view is continuously adjustable. The microscopic surface topography of atomic resolution and nanoscale resolution are tested by experiments. The effect of STM on the microscopic morphology under different resolutions Test the feasibility.