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本文概要介绍了用于检验研磨和抛光表面形状正确度的仪器和方法。文中并引进了一些检验装置的光学示意图以及这些装置的主要技术特性和精度特性。
This article provides an overview of the instruments and methods used to verify the correctness of the shape of the ground and polished surfaces. The article also introduces some optical schematics of inspection devices and the main technical and precision characteristics of these devices.