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本文通过在自行设计的装置中,用丙酮作为有机源,并和氢气、氩气相混合作为反应气体,用钨棒为放电电极,在数kPa的气压以及一万多伏高压下直流起弧,并在10A与70V条件下稳定的等离子体放电,产生5000℃以上高温,分解反应气体,在硅片上快速生长出薄膜。实验得出的薄膜,用X射线光电子能谱分析,其表面主要成分是碳;激光喇曼测定在金刚石的特征峰位1333cm~(-1)出现尖锐的谱峰;从电镜照片中观察到,它有较好晶形又连成一
In this paper, acetone is used as the organic source in a self-designed device, and mixed with hydrogen and argon as the reaction gas, the tungsten rod as the discharge electrode, DC arc starting at a pressure of several kPa and high voltage of ten thousand volts, Stable plasma discharge at 10 A and 70 V produces a high temperature of 5000 ° C or above, decomposes the reaction gas, and rapidly grows a thin film on a silicon wafer. The films obtained by the experiment were characterized by X-ray photoelectron spectroscopy (XPS) and the main component of the film was carbon. Laser Raman spectroscopy showed a sharp peak at 1333cm ~ (-1) at the characteristic peak of diamond. From the electron micrographs, It has a good crystal form and even into one