在核物理制靶技术中,采用真空蒸发制备有衬靶和自支撑靶膜较为普遍。为了在蒸发过程中测量靶膜的生长情况和控制薄膜厚度,我们自制了膜厚监控石英晶体振荡器。 这一设备比较简单,使用方便。根据我们的实际情况,分别得到六种元素的频率与厚度的关系曲线。从而改善了以前采用几何方法估计蒸发材料的不准确性。 In the nuclear physics target technology, the use of vacuum evaporation of liner target and self-supporting target film is more common. In order to measure the growth of the target membrane and control the thickness of the membrane during the evaporation process, we made a self-made film thickness monitoring quartz crystal oscillator. This device is relatively simple and easy to use. According to our actual situation, respectively, the relationship between the frequency of six elements and the thickness of the curve. Thus improving the previously inaccurate estimation of evaporative materials using geometric methods.