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通过有限元数值模拟软件与正交试验设计相结合的方法对CVD设备反应室的温度场进行优化。研究了激励电流、电流频率、线圈匝数、线圈间距和加热时间对沉积石墨管温度场的影响。引入平均温度、温度标准差及变异系数指标,采用5因素5水平的正交试验法来设计参数组合进行有限元模拟。通过极差分析和方差分析确定影响石墨管的温度、温度方差及变异系数指标的主次因素,确定最优值。最后对最优的感应加热参数进行模拟验证。结果表明:优化后的温度均匀性获得改善。同时,模拟次数大量减少,提高了优化效率。
The temperature field in the reaction chamber of CVD equipment is optimized by the combination of finite element numerical simulation software and orthogonal test design. The effects of excitation current, current frequency, coil number, coil spacing and heating time on the temperature field of deposited graphite tube were investigated. The average temperature, standard deviation of temperature and coefficient of variation were introduced. The parameters of 5-factor-5 orthogonal test were used to design the finite element simulation. Through the range analysis and analysis of variance to determine the primary and secondary factors that affect the temperature, temperature variance and coefficient of variation of graphite tube to determine the optimal value. Finally, the optimal induction heating parameters are simulated. The results show that the optimized temperature uniformity is improved. Simultaneously, the number of simulations is greatly reduced, which improves the optimization efficiency.