Magnetically soft Fe-Co-based nanocrystalline alloy films were produced by two preparation methods:One using a new energetic cluster deposition technique and another using a conventional magnetron sputtering technique.Their structural,static magnetic properties and high-frequency magnetic characteristics were investigated.In the energetic cluster deposition method,by applying a high-bias voltage to a substrate,positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source,to form a high-density Fe-Co alloy cluster-assembled film with good high-frequency magnetic characteristics.In the conventional magnetron sputtering method,only by rotating substrate holder and without applying a static inducing magnetic field on the substrates,we produced Fe-Co-based nanocrystalline alloy films with a remarkable in-plane uniaxial magnetic anisotropy and a good soft magnetic property.The obtained Fe-Co-O,Fe-Co-Ti-N,and Fe-Co-Cr-N films all revealed a high real permeability exceeding 500 at a frequency up to 1.2 GHz.This makes Fe-Co-based nanocrystalline alloy films potential candidates as soft magnetic thin film materials for the high-frequency applications. Magnetically soft Fe-Co-based nanocrystalline alloy films were produced by two preparation methods: One using a new energetic cluster deposition technique and another using a conventional magnetron sputtering technique. Their structural, static magnetic properties and high-frequency magnetic characteristics were characterized by. the energetic cluster deposition method, by charged a high-bias voltage to a substrate, positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source, to form a high-density Fe-Co alloy cluster-assembled film with good high-frequency magnetic characteristics. The conventional magnetron sputtering method, only by rotating substrate holder and without applying a static inducing magnetic field on the substrates, we produced Fe-Co-based nanocrystalline alloy films with a remarkable in-plane uniaxial magnetic anisotropy and a good soft magnetic proper ty.The obtained Fe-Co-O, Fe-Co-Ti-N, and Fe-Co-Cr-N films all revealed a high real permeability exceeding 500 at a frequency up to 1.2 GHz.This makes Fe-Co-based nanocrystalline alloy films potential candidates as soft magnetic thin film materials for the high-frequency applications.