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利用表面预镀中间层在45号钢上化学气相沉积(CVD)得到了金刚石膜。钢基底表面金刚石涂层具有许多潜在应用价值,但直接在钢上沉积生长金刚石面临长的形核期,铁原子的触媒作用和热膨胀不匹配等严重问题。文中采用钢基底表面预镀中间层的方法,阻止碳向基底中扩散,增强膜基结合和抑制SP2杂化碳的沉积。分别研究了直接在钢基底上、表面预镀铜膜和表面预镀硅膜钢基底上热丝法沉积金刚石膜的工艺特点。通过SEM、Raman谱和划痕法检验表明,钢基底表面预镀硅膜作为中间层,是一种在钢上沉积金刚石膜的有效方法。
A diamond film was obtained by chemical vapor deposition (CVD) on a No. 45 steel using a surface pre-plated intermediate layer. There are many potential applications for the diamond coating on the steel substrate surface. However, the deposition of diamond directly on the steel faces a serious problem of long nucleation period, catalytic action of iron atoms and thermal expansion mismatch. In this paper, a method of pre-plating an intermediate layer on the surface of a steel substrate is adopted to prevent the carbon from diffusing into the substrate, enhance the film-based bonding and inhibit the deposition of SP2 hybridized carbon. The technological characteristics of direct deposition of diamond films on the steel substrate, the surface pre-plated copper film and the surface pre-plated silicon film on the hot wire method were studied respectively. SEM, Raman spectrum and scratch test showed that the pre-silicon film on the steel substrate surface was an intermediate layer, which was an effective method for depositing diamond film on steel.