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一、引言至今人们熟悉的角度块测定法主要是用光学法以平面形式在角度块中央对夹角的平面进行触测。用这些方法不可能测定被测面的宏观几何形状。所以在必要时分别用干涉法或机械法测出角度后再确定形状偏差。但是这样仍旧很难估算出形状偏差对测得的实际角度数值的影响。在用下述的光学方法时,为了测定角度块
I. INTRODUCTION Nowadays people are familiar with the angle block measurement method mainly using optical method to planarly measure the angle of the plane in the angle of the central block to touch. With these methods it is not possible to determine the macroscopic geometry of the surface to be measured. So when necessary, respectively, by interferometry or mechanical method to determine the angle and then determine the shape deviation. However, it is still difficult to estimate the effect of shape deviation on the measured actual angle values. In the optical method described below, the angle block is measured