论文部分内容阅读
等离子辅助沉积技术是一种能大规模高质量制造光学膜的技术 ,本文报道了等离子辅助源的性能指标 ,用这个源制造的Ti O2 膜工艺与成膜质量 ,以及用等离子辅助生产减反膜的工艺。
Plasma-assisted deposition technology is a technology capable of producing optical films on a large scale with high quality. In this paper, the performance indexes of plasma-assisted sources, the process and the quality of Ti O2 films fabricated by this source, and the use of plasma-assisted subtractive film Process.