高能注入离子在固体中的损伤分布一般采用直接法计算.但是在化合物靶的情况下,各类靶反冲原子所淀积的损伤能及其分布矩难以正确估算,直接影响直接法的运用.本文引入多次矩法予以解决,取得了良好的效果. The damage distribution of high-energy implanted ions in solid is generally calculated by direct method, but in the case of compound target, the damage energy and the distribution moment of various target recoil atoms can not be correctly estimated, which directly affects the application of direct method. This paper introduces multiple moments method to be solved, and achieved good results.