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提出了一种S曲线光强控制模型的参数优化方法。在分析S曲线光强控制模型的参数变化对线条闭合质量影响的基础上,以对接区域曝光量分布曲线恰好存在一个极值点时为最优,确定出光强控制模型中的圆弧弧度θ和曲率半径R的函数关系。基于该优化方法的对接区域长度由θ唯一确定,且当θ较小时,其仅为斜线段光强控制方法确定的对接长度的2倍。实验结果与理论分析吻合,表明该优化方法进一步增加了对接区域曝光量分布的有效过渡长度,减缓了曝光量在路径方向上的变化速率,从而在保证直写效率的同时提高了线条对接质量。
A parameter optimization method for S-curve intensity control model is proposed. Based on the analysis of the influence of the parameter change of the S-curve intensity control model on the line closure quality, the arc curvature θ in the light intensity control model is the best when there is exactly one extremal point in the exposure curve of the docking area And the radius of curvature R as a function of. The length of the docking area based on this optimization method is uniquely determined by θ, and when θ is small, it is only 2 times of the docking length determined by the slant-line light intensity control method. The experimental results are in good agreement with the theoretical analysis, which shows that the optimization method further increases the effective transition length of the exposure distribution in the docking area and slows down the rate of change of the exposure in the direction of the path, thereby improving the quality of the line connection while ensuring the direct writing efficiency.