介绍了一种利用非接触式方法实时扫描测量精密元件表面轮廓的技术，同时研制了计算机自动控制的多功能表面轮廓仪．该仪器可对各种超光滑球面及平面进行平移和旋转的实时扫描采样；利用干涉共模抑制技术，有效抑制了各种噪声，测量数据可靠；实时显示表面轮廓参数及轮廓图，仪器横向分辨率为１μｍ，纵向分辨率为０．１ｎｍ． A technique for real-time scanning of the surface profile of a precision component by using a non-contact method is introduced. At the same time, a multifunctional surface profilometer with computer automatic control is developed. The instrument can be a variety of ultra-smooth spherical and plane translation and rotation of the real-time scanning sampling; the use of interference common mode suppression technology, effectively suppress a variety of noise, reliable measurement data; real-time display of surface profile parameters and contour maps, the instrument horizontal resolution The rate is 1 μm and the vertical resolution is 0.1 nm.