在半导体器件制造的扩散工艺中,历来用高纯二氧化硅制成的石英舟作为承载体把硅片送入炉内或送出。但石英舟在高温下会软化变形,导致硅片破裂,扩散不均匀。因此,国外已广泛采用高纯硅棒制成的硅舟替代石英舟。上半厂以多品硅棒为材料,采用机械加工法,自行设计工夹具和加工工艺,成功地研制出高纯硅舟。自去年起,向用户 In the diffusion process of semiconductor device manufacturing, the quartz boat made of high-purity silica has been used as the carrier to transport the silicon wafer into the furnace or to send out. However, the quartz boat will soften and deform under high temperature, resulting in rupture and uneven diffusion of silicon. Therefore, foreign countries have been widely used silicon boat made of silicon replaced the quartz boat. The first half of the factory to multi-product silicon rods for the material, the use of mechanical processing, design their own fixtures and processing technology, successfully developed a high-purity silicon boat. Since last year, to the user