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研制了一套CCD光电参数测试系统,可实现对CCD的无效像元、相对光谱响应、响应度、等效噪声照度、动态范围、面响应度不均匀性等光电参数的全自动测试。CCD的相对光谱响应测试基于单光路直接比较法实现,而其他CCD光电参数的测试则基于特制的积分球光源。四个可独立开关的溴钨灯分别安置于四个次积分球内,经高精度电动光阑与主积分球级联,主积分球壁上的照度计经标定后可实时测试积分球光源出口照度值。该光源色温不变,可在大动态范围内以较高精度实现连续调节,满足CCD光电参数测试的需求。利用上述装置对E2V公司科学级CCD47-10B进行了实际测试,并分析了测量的不确定度。结果表明:相对光谱响应测试覆盖光谱范围400~1000nm,不确定度为4.37%。光电转换参数测试装置距离光源出口23 mm处照度覆盖动态范围0~235 lx,Φ80 mm范围内照度均匀性达到99%,测试不确定度为4.9%。该系统可用于航天级CCD的光电参数测试及芯片甄选。
A CCD photoelectric parameter test system was developed, which can fully test the photoelectric parameters such as invalid pixels, relative spectral response, responsivity, equivalent noise luminance, dynamic range and surface responsivity inhomogeneity. The CCD’s relative spectral response test is based on a single optical direct comparison method, while the other CCD photoelectric parameters are based on a specially designed integrating sphere light source. Four independently switchable bromine tungsten lamps are respectively disposed in four sub-integrating sphere, and the high-precision electric diaphragm is cascaded with the main integrating sphere. The main integrating sphere wall illuminometer can be calibrated to test the integrating sphere light source exit in real time Illumination value. The color temperature of the light source unchanged, in a large dynamic range with high accuracy to achieve continuous adjustment to meet the CCD photoelectric parameters of the test needs. E2V company scientific grade CCD47-10B was tested by the above device, and the uncertainty of measurement was analyzed. The results show that the relative spectral response test covers the spectral range of 400 ~ 1000nm with the uncertainty of 4.37%. Photoelectric conversion parameters Test device 23 mm from the exit of the illuminance Illumination coverage Dynamic range 0 ~ 235 lx, Φ80 mm Illumination uniformity 99%, test uncertainty of 4.9%. The system can be used for space-based CCD photoelectric parameters of the test and chip selection.