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为了解决光纤光栅传感器同时测量多个参量的难题,结合锥形光纤技术和光纤光栅技术,设计了一款新型双锥形光纤光栅。采用传输矩阵法,借助二层和三层单模光纤纤芯基模有效折射率的色散方程及标量有限元法理论建模,数值分析了均匀腐蚀区直径为3μm时双锥形光纤光栅的反射谱特性。采用氢氟酸渐变腐蚀法实验制备了双锥形光纤光栅,均匀腐蚀区直径为3μm时,呈现12个反射峰,2个主峰和10个次峰,与理论分析结果基本吻合。同时选取其中3个反射峰测量了温度、折射率和液位,同步测量灵敏度分别为9.63nm/℃、1975.96nm/RIU、26.07nm/cm。双锥形光纤光栅制作简单,作为传感器可同时测量多个参量,不但能有效降低成本,还能拓宽光纤光栅传感器的设计思路。
In order to solve the problem that fiber grating sensors measure multiple parameters at the same time, a new type of double-tapered fiber grating is designed combining with tapered fiber technology and fiber grating technology. The transmission matrix method is used to model the effective refractive index of the two-layer and three-layer single-mode fiber core matrix and the scalar finite element method. The birefringence of biconical fiber grating is analyzed numerically when the diameter is 3μm Spectral characteristics. Double tapered optical fiber gratings were fabricated by hydrofluoric acid gradual etching method. When the uniform etching area diameter was 3μm, 12 reflection peaks, 2 main peaks and 10 sub-peaks appeared, which were in good agreement with the theoretical analysis. At the same time, three reflection peaks were selected to measure the temperature, refractive index and liquid level. The sensitivity of synchronous measurement was 9.63nm / ℃, 1975.96nm / RIU and 26.07nm / cm respectively. Biconical fiber grating is easy to manufacture. As a sensor, multiple parameters can be measured at the same time, which can not only effectively reduce the cost, but also broaden the design ideas of FBG sensor.