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1 Introduction Up to now accuracy in magnitude of nanometer has been achieved in ultra-precision machining technology, the contour accuracy is up to λ/4: λ/10 for an ultra-precision machine with a movement range of 400: 1000mm, where, λ=0.633μm, and the surface roughness Ra is up to sub-nanometer; the resolution of feedback system for measurement is up to 100: 0.1mm. This requires an ultra-precision measuring system has a measuring error≤
1 Introduction Up to now accuracy in magnitude of nanometer has been achieved in ultra-precision machining technology, the contour accuracy is up to λ / 4: λ / 10 for an ultra-precision machine with a movement range of 400: 1000 mm, where, λ = 0.633μm, and the surface roughness Ra is up to sub-nanometer; the resolution of feedback system for measurement is up to 100: 0.1mm. This requires an ultra-precision measuring system has a measuring error error ≦