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为了符合实际加工情形 ,推导了梯形相位光栅衍射效率 ,与矩形光栅作了比较 ,设计其用作高密度光盘存储光学头分光束器件时的各参数 ,并分析推导了系统和随机加工误差对光栅性能的影响及设计原则
In order to meet the actual machining situation, the diffraction efficiency of trapezoidal phase grating was deduced, compared with the rectangular grating, designed to be used as a high-density optical disk optical beam splitter device parameters, and analysis and derivation of the system and random machining errors on the grating The impact of performance and design principles