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利用薄膜环氧树脂复制法生产高精度激光扫描元件,使得制造成本显著降低。另外,在高精度应用场合中所需要的精密元件实际上不能用一般方法或金刚石加工。本文介绍检流计反射镜和多面转镜的结构和制造方法。复制方法图1示出用薄膜环氧树脂复制检流计反射镜的工艺过程。把玻璃样板置于真空室内,按顺序在样板镀上释放剂、SiO膜和铝膜。然后把由铝或铍制成的检流计基体粘接在镀过膜的样板上,经周化后,把复制品从样板上分离开,对多余的环氧树脂进行微调。用溶剂取样释放
The use of thin-film epoxy replication method to produce high-precision laser scanning elements, making the manufacturing cost significantly reduced. In addition, precision components required for high-precision applications can not actually be machined using conventional methods or diamond. This article describes the galvanometer mirror and multi-faceted mirror structure and manufacturing methods. Copy Method Figure 1 shows the process of replicating a galvanometer mirror with a thin-film epoxy. Put the glass sample in a vacuum chamber, and sequentially release the sample on the sample release agent, SiO film and aluminum film. The base of the galvanometer, made of aluminum or beryllium, is then bonded to the coated plate. After the cycle, the replica is separated from the plate and the excess epoxy is fine-tuned. Sampling with solvent release