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介绍了用电子束蒸发制作ＷＯ３气敏薄膜、溅射掺Ａｕ、膜的后退火等工艺，着重讨论了ＷＯ３膜的稳定化过程。
The production of WO3 gas-sensing thin films by electron beam evaporation, sputtering-doped Au and post-annealing of the films were introduced. The stabilization of WO3 films was also discussed.